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An Inverse Optical Scattering Approach to Submicron Integrated Circuit Feature Inspection

assignment_turned_inproject15 Aug 1989(Started)-31 Jan 1992(Ended)Closed

Funder: National Science FoundationProject code: 8903372

Funded under: Directorate for Engineering | Division of Industrial Innovation & Partnerships

An Inverse Optical Scattering Approach to Submicron Integrated Circuit Feature Inspection

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An Inverse Optical Scattering Approach to Submicron Integrated Circuit Feature Inspection

An Inverse Optical Scattering Approach to Submicron Integrated Circuit Feature Inspection

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