Powered by OpenAIRE graph
Found an issue? Give us feedback

WARM

Wide Angle and Resolution Metrology
Funder: European CommissionProject code: 190175162 Call for proposal: HORIZON-EIC-2021-ACCELERATOROPEN-01
Funded under: HE | HORIZON-EIC-ACC-BF Overall Budget: 6,357,210 EURFunder Contribution: 2,500,000 EUR
Description

WOOPTIX will upgrade to a 300mm field of view (FoV) metrology system a ready-to-market 50mm field of view Wooptix´s tool, based on a disruptive technology that measures the phase component of a beam of light (wavefront sensor) with a naked sensor, reaching a resolution orders of magnitude higher than other wavefront sensors. This technology has been patented by the company. The scalability of the solution will present an outstanding business opportunity for WOOPTIX leading the company to achieve an amazing turnover rise. Our semiconductor metrology system is capable of measuring the full 300mm silicon wafer geometry with a lateral resolution of 3.2µm and a height resolution of 0.3nm acquired in a single image snapshot in 100ms while capturing 15 million data points. The system works by using a standard digital image sensor to acquire the intensity of the reflected, non-coherent light from the silicon surface at two sperate locations along the optical path.

Partners
Data Management Plans
Powered by OpenAIRE graph
Found an issue? Give us feedback

Do the share buttons not appear? Please make sure, any blocking addon is disabled, and then reload the page.

All Research products
arrow_drop_down
<script type="text/javascript">
<!--
document.write('<div id="oa_widget"></div>');
document.write('<script type="text/javascript" src="https://www.openaire.eu/index.php?option=com_openaire&view=widget&format=raw&projectId=corda_____he::e7acb5af94d4d4ebe25f8ae7205d8147&type=result"></script>');
-->
</script>
For further information contact us at helpdesk@openaire.eu

No option selected
arrow_drop_down