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Lithography Enhancement towards Nano Scale

assignment_turned_inproject01 Jan 2009(Started)-01 Dec 2011(Ended)Closed

Funder: European CommissionProject code: 120011 Call for proposal: JU-ENIAC-2008-1

Funded under: FP7 | SP1 | SP1-JTI

Detailed project information (CORDIS)

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- Summary
- DMPs

Partners

MENTOR GRAPHICS DEVELOPMENT CROLLES SARL , LETI , LAM , IMEC , CSIC , JSR MICRO NV , STM CROLLES , DPE , FEI , MIY , ASML (Netherlands) , FUNDACION CIDETEC

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