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LENS

Lithography Enhancement towards Nano Scale

assignment_turned_inproject01 Jan 2009(Started)-01 Dec 2011(Ended)Closed

Funder: European CommissionProject code: 120011 Call for proposal: JU-ENIAC-2008-1

Funded under: FP7 | SP1 | SP1-JTI

Detailed project information (CORDIS)

LENS

- Summary
- DMPs

Partners

CEA , STM CROLLES , MIY , DPE , FEI , CSIC , FUNDACION CIDETEC , LAM , ASML (Netherlands) , MENTOR GRAPHICS DEVELOPMENT CROLLES SARL , IMEC , JSR MICRO NV

Data Management Plans

Start a new DMP in Argos

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